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Estimation of Nitrogen Trifluoride (NF3) Emissions and Future Management Strategies in South Korea's Semiconductor and Display Industries
Himchan Park, Sang-Hyoun Kim
J Korean Soc Environ Eng. 2024;46(5):205-218.   Published online May 31, 2024
DOI: https://doi.org/10.4491/KSEE.2024.46.5.205
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