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Author :
Chang Yong Choi 1 Articles
391 전자빔 기술을 이용한 반도체 공정의 삼불화질소(NF3) 분해
류재용, 최창용, 김종범, 이상준, 김승곤, 곽희성, 윤영민
J Korean Soc Environ Eng. 2012;34(6):391
DOI: https://doi.org/10.4491/KSEE.2012.34.6.391
  Cited By 4
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