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Current Research Trends and the Need for Localization in Ultrapure Water Production Facilities in Semiconductor Industries
Boungsu Kwon, Sangho Lee, Seoktae Kang, Jaelim Lim
J Korean Soc Environ Eng. 2020;42(10):493-512.   Published online October 31, 2020
DOI: https://doi.org/10.4491/KSEE.2020.42.10.493
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